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Instytut Technologii Elektronowej
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ABOUT US
photolitography The Department of Micro- and Nanotechnology of Wide Bandgap Semiconductors is located in a campus of the Institute of Electron Technology (ITE) at Al. Lotnikow 32/46 in Warsaw, bldg. IV. The department has a broad experience in the process technologies and device architectures for optoelectronics and electronics. Relevant experience includes processing of III-V devices involving nanostructures (RCLED, HEMTs, and HBVs), development of ohmic contacts on p-typ GaN, technology of transparent conducting oxides including p-type ZnO films, development of sulphur passivation method for GaSb-based IR detectors. The Department is a part of the Centre of Excellence-Centre of Physics and Technology of Photonic Nanostructures (CEPHONA) at IET. Moreover, the Department is teamed with the Low Temperature Physics Lab at the Institute of Physics of Polish Academy of Sciences (IFPAN) and is a part of the Centre of Excellence-Centre of Physics and Technology of Low-Dimensional Structures (CELDIS) at IFPAN.